Title:
Substrate treating method
Document Type and Number:
Japanese Patent JP5999625
Kind Code:
B2
Inventors:
Muramoto
Application Number:
JP2012068082A
Publication Date:
September 28, 2016
Filing Date:
March 23, 2012
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304; H01L21/26
Domestic Patent References:
| JP2004259734A | ||||
| JP2010003845A | ||||
| JP11102884A | ||||
| JP5243166A |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Goromaru Masami
Mio Kawasaki
Goromaru Masami
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