To provide a substrate treatment device which has a structure where pipes are made to pass through the base of a treatment chamber and in which treatment liquid is prevented from leaking from a through part.

The base 11 of the treatment chamber 1 is made into an inclined face so that chemicals or pure water is converged to a drainage port 12. A pipe insertion part 9 is disposed at a comparatively high position on the inclined face. The pipe insertion part 9 includes a cylindrical member 91 arranged so as to penetrate the inclined base 12 of the treatment chamber 1, an annular member 92 fixed at the upper end of the cylindrical member 91 and a fitting plate 94 disposed to block a space surrounded by the cylindrical member 91 and the annular member 92 from above. A plurality of screw holes are formed in the fitting plate 94 so that they are made to pass through the plate. Through- fittings 97 for inserting and holding the pipes such as a chemical pipe 7 and a pure water pipe 8 are screwed into the screw holes.