PURPOSE: To make the flow of the electrolyte in a circulation chamber uniform and to prevent an electrolyte treated surface from receiving damage by forming the flow passage of a suction cup for executing a substrate electrolyte treatment to a specific geometric form.
CONSTITUTION: An elastic joint 6 included in an electrical insulative case 1 is pressed to the electrolyte treated surface S to hermetically seal its peripheral edges to prevent the leakage of the electrolyte to be packed. The surface S is provided with a flat and rectangular electrode plate 3. An electrolyte flow chamber 8 and perpendicular grooves 18 are formed and are connected to this electrode 2. The electrolyte in such constitution is introduced via a distribution chamber 10, is passed toward C in a flow chamber 8 via an inflow chamber 9a and the perpendicular grooves 17, 18 and is discharged from the distribution chamber 10 via the perpendicular grooves 18, 17 and an absorption chamber 9b. The spread along the segment r2 of the distribution chamber 10 of this time is so formed that the electrolyte flows gently between a tube 13 and the flow chamber 8. As a result, the flow of the electrolyte on the surface S is made uniform and the uniform electrolyte treatment is assured.
JIERAARU GUAIRARUDOU
JIYAN PIEERU SHIZERU