To properly suck and set a mother substrate even when the number and the position of suction ports which do not contribute the suction are changed in each case.
The suction table is provided with a table body 41 which has many suction ports 42 arranged to be aligned and on which the mother substrate W is placed, many individual suction flow passages 43 having one end connected to the suction port 42 and another end extending to an evacuating means 45, many flow passage opening and closing means 46 for respectively opening and closing the individual suction flow passages 43 divided into a plurality of lines corresponding to a plurality of sectioned areas Ea by sectioning suction set area in response to each change of the suction set area due to a plurality of the breaks, a storing means 40 for storing sequence data associating break procedures with the sectioned area Ea constituting the suction set area in each case and a control means 34 for controlling the plurality of the flow passage opening and closing means 46 based on the sequence data.
KAKIZAWA TAKESHI
MIYASAKA YOICHI
