PURPOSE: To obtain the small sized resonator by forming a high frequency transmission line employing a copper oxide group material as a superconducting thin film and forming a loop shaped transmission line having an open end.
CONSTITUTION: A high frequency transmission line is made of a superconducting thin film and the high frequency transmission line is made of a single line made of a loop strip or a microstrip line. For example, a Bi-Sr-Ca-Cu-O superconducting thin film is formed on an MgO substrate 1 by the sputtering vapor-deposition, the laser abrasion method, the electronic beam vapor-deposition method or the CVD method or the like. After the heat treatment, the metallic thin film 3 is vapor-depositted and a loop strip or microstrip line is formed on the film 3. Then a metallic thin film 4 is vapor-depositted to form a high frequency circuit device.
JPH0230654 | PRODUCTION OF OXIDE SUPERCONDUCTOR |
JPS6412418 | MANUFACTURE OF COMPOSITE OXIDE SUPERCONDUCTING FILM |
JPH05294621 | SUPERCONDUCTOR |
ENOHARA AKIRA
SAGAWA MORIKAZU
MAKIMOTO MITSUO