PURPOSE: To enable the elimination of the influence of the abrasion of a stand upon measurements by a method wherein end members, which can move along two axes crossing each other at right angles, and a calibration material which can arlitrarily move to a measuring position are prepared, and a measurement takes place following the calibration measurement.
CONSTITUTION: Detecting and members are attached to support stands, which can move in a X-direction, so that the members can move at right angles with the X- direction, and the calibration material, which can optionally move to a calibration position, are prepared. The measurement is executed following the calibration which takes place along the X-direction. In case, for example, a thickness of a sample 71 is measured, detecting ends 81 are attached to 2 trucks 78 of an upper and a lower truck, which can move along rails 77 on stands 76, so that the detecting ends can move vertically. The calibration is first conducted along the X-direction in a manner to hold a correction material 81 between the nip formed by the upper and the lower detecting end 81 at the position where the sample 71 is located. The measurement of the sample 71 is then performed following the results, and this permits the accurate measurement of the thickness without being affected by the abrasion and loosening of the stands even if the stands are worn out and loosened.
KONISHI JINKOU
OKADA HIROO
