PURPOSE: To facilitate and ensure the manufacture and to keep a desired transmission efficiency of a surface acoustic wave by melting minute particles scatteringly onto a piezoelectric substrate so as to constitute a space post.
CONSTITUTION: When a spacer post 6 is formed on a piezoelectric substrate 1, minute particles whose particle diameter is arranged within a prescribed range are arranged to a required region on the piezoelectric substrate 1 and the minute particles are scattered at random on the substrate with a means exerting vibration to the piezoelectric substrate. Moreover, the particles are molten while being pressurized and fixed on the piezoelectric substrate 1. Thus, roughness caused on the substrate surface and adverse effect on the propagation of the surface acoustic wave are avoided, the manufacture is facilitated to eliminate the need for installation of a large sized equipment.
MOCHIZUKI NORIHIRO
NAKAMURA KENJI
