PURPOSE: To inspect the projection and recess state of the surface of a body to be inspected without any environment restrictions by irradiating the body to be inspected with a detection wave signal such as an ultrasonic wave, and receiving its reflected wave by a wave receiver group and imaging the surface shape of the body to be inspected.

CONSTITUTION: This device consists of a wave transmitter 2, the receiver group 3, an oscillator 4, and a CPU9, etc. Then when the detection wave signal such as an ultrasonic wave is sent out of the transmitter 2 to the body 1 to be inspected, the signal is reflected by the surface of the body 1 to be inspected and received by respective receivers in the receiver group 3. The amplitude and phase of each received signal of the receiver group 3 are found and supplied as hologram data to an arithmetic processing part. The same operation is carried out as to detection wave signals of all frequencies to generate hologram data as to all combinations of the all frequencies and all wave reception positions. The arithmetic processing part performs specific arithmetic operation with the supplied hologram data, and consequently the surface shape of the body 1 to be inspected is imaged. Then this body image is matched with images which are registered previously and the surface shape of the body 1 to be inspected is judged from whether both images coincide with each other or not.