Title:
SURFACE SHAPE MEASURING DEVICE
Document Type and Number:
Japanese Patent JPH05141932
Kind Code:
A
Abstract:
PURPOSE:To prevent the reduction of measurement precision due to the external light. CONSTITUTION:A light receiving means 2 arranged with multiple photoelectric transfer elements converting the light into the electric quantity corresponding to the light intensity at every 1/2-pitch of interference fringes and a difference calculating means 3 calculating and outputting the difference between the electric quantities obtained from adjacent photoelectric transfer elements 21 are provided. Irregularities of the surface of a measured object 5 are detected by the phase of the output signal of the difference calculating means 3.
Inventors:
SAMEDA YOSHITOMI
Application Number:
JP30148191A
Publication Date:
June 08, 1993
Filing Date:
November 18, 1991
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
G01B11/24; (IPC1-7): G01B11/24
Attorney, Agent or Firm:
Noriyuki Noriyuki