SURFACE TREATMENT AND DEVICE THEREFOR

Title:

SURFACE TREATMENT AND DEVICE THEREFOR

Document Type and Number:

Japanese Patent JP3781572

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To continuously perform surface treatment without using a chemical, without causing contamination in material to be treated, and without an increase in the used quantity of ultrapure water by bringing the surface to be treated of the material to be treated into contact with the ultrapure water in the presence of an ion exchanger and treating the eluted ionic material by the ion exchanger to continue elution.
SOLUTION: In a first recessing part 10a of a treating vessel 10, material to be treated 12 is fixed so that its surface to be treated 12a is on the up side, and an agitator 14 is arranged above is having a prescribed clearance S. When an agitating member 14b is rotated while feeding treating slurry 16 to the clearance S through a feeding hole 15 of a shaft part 14a, the treating slurry 16 flows outward along the surface to be treated 12a in the clearance S and overflows from the edge part and is recovered. Ultrapure water in the overflowed treating slurry 16 is circulated, resin 16a is regenerated and reused. The treating slurry 16 is forcibly agitated by action of the agitator to turn it a turbulent flow. Powdery ion exchange resin 16a easily approaches or comes into contact with the water to be treated, and the ionic material condensed near the surface to be treated 12a is removed to activate the ultrapure water again.

Inventors:

Akira Fukunaga
Haruko Ohno
Toshiyuki Kato

Application Number:

JP5286899A

Publication Date:

May 31, 2006

Filing Date:

March 01, 1999

Export Citation:

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