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Patent Searching and Data


Title:
SURFACE TREATMENT METHOD FOR METAL
Document Type and Number:
Japanese Patent JP2000254790
Kind Code:
A
Abstract:

To simplify a process and to form a fine pattern by removing an oxidation film formed on a metal surface with a laser beam and adjusting a thickness of the oxidation film.

A laser beam 7 is emitted from a laser beam oscillator 3, an energy density of the laser beam 3 is made variable by a beam expander 9 to be controllable. While a metal 1 is moved by a table movable back/forth and left/right. An arbitrary shape pattern is applied to the metal 1 by a mask 10. The metal 1 is either colored stainless steel or colored titanium, it is preferable to use the laser beam 3 having a wave length of 150-300 nm. An energy density of the laser beam 3 receiving part is set to 30-200 [mj/puls.cm2]. An excimer laser beam 3 having an oscillation source of ArF, KrF ArCl, KrCl, XeBr, or F2 is adopted for the laser beam 3.


Inventors:
KARASAWA TAKESHI
MORI ATSUO
Application Number:
JP6077199A
Publication Date:
September 19, 2000
Filing Date:
March 08, 1999
Export Citation:
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Assignee:
NIIGATA PREFECTURE
International Classes:
B44C1/22; B23K26/351; B23K26/361; H01S3/00; (IPC1-7): B23K26/00; B44C1/22; H01S3/00
Attorney, Agent or Firm:
Tsuyoshi Yoshii (1 person outside)