SURFACE WORKING METHOD - AGENCY IND SCIENCE TECHN

Title:

SURFACE WORKING METHOD

Document Type and Number:

Japanese Patent JPH06126469

Kind Code:

A

Abstract:

PURPOSE: To form fine ruggedness on the surface of a work while maintaining the flatness and smoothness of the surface.

CONSTITUTION: The irradiated region of the work formed by irradiating the region with an ion beam of several 100KeV builds up in the case of the work made of metallic or ceramic materials and recesses in the case of the glass work. The mentioned above phenomenon is utilized in this method. Namely, the building up or recessing amt. is controlled by controlling the ion species for irradiation, energy and irradiation quantity and the space distribution is controlled by making combination use of the space scanning of the ion beam and mask patterns, by which the fine ruggedness is formed in arbitrary patterns on the surface of the work while the size over the entire part of the work is maintained.

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Inventors:

IKEYAMA MASAMI
NIWA HIROAKI
TANEMURA SEITA
NAKAO SETSUO
SAITO KAZUO
MIYAGAWA YOSHIKO
MIYAGAWA SOUJI

Application Number:

JP30831492A

Publication Date:

May 10, 1994

Filing Date:

October 22, 1992

Export Citation:

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Assignee:

AGENCY IND SCIENCE TECHN

International Classes:

B23K15/00; (IPC1-7): B23K15/00

Domestic Patent References:

JPH03243203A	1991-10-30
JPS5011580U
JPH0470279U	1992-06-22
JPS61131462A	1986-06-19

Attorney, Agent or Firm:

Director, Nagoya Institute of Industrial Technology, AIST

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