Title:
SUSCEPTOR ASSEMBLY
Document Type and Number:
Japanese Patent JPS6038813
Kind Code:
A
Abstract:
A susceptor for holding substrates during a high temperature vapor deposition process is constructed from separable top, bottom and side plates interlocked to each other in a gravity maintained assembly.
Inventors:
MAABIN EI KUSUMIAATSU
ROBAATO EFU PIJIYASUZETSUKU
ROBAATO EFU PIJIYASUZETSUKU
Application Number:
JP13918784A
Publication Date:
February 28, 1985
Filing Date:
July 06, 1984
Export Citation:
Assignee:
ULTRA CARBON CORP
International Classes:
H01L21/205; C23C16/458; C30B25/12; H01L21/31; (IPC1-7): H01L21/205; H01L21/31
Domestic Patent References:
| JPS5637297A | 1981-04-10 |
Attorney, Agent or Firm:
Hideto Asamura