PURPOSE: To improve characteristics of synthesized superconductor and to synthesize a thick superconductor at high rate, by bringing an organometallic raw material into contact with vapor of a ligand thereof during a process of heating or transporting the raw material.
CONSTITUTION: For example, YBa2Cu3O7-x is synthesized on a MgO substrate by using a CVD device having five raw material heating lines. In the synthesis, a hexafluoroacetylacetone derivative of Y, Ba or Cu is used as the raw material and vapor of hexafluorcaoetylaceton evolved by heating is sent to a specimen chamber charged with the raw material. The raw material heating temperature as a synthesis condition is 150°C in Y, 200°C in Ba or 145°C in Cu and the reaction is carried out by using Ar as a carrier gas and oxygen as a reaction gas under 9 Torr pressure in a reaction furnace at 850°C substrate temperature for 30 minutes. After the reaction, YBa2Cu3O7-x is naturally cooled in an oxygen flow to room temperature.
MATSUNO SHIGERU
YOSHIZAKI KIYOSHI
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