Title:
SYSTEM AND METHOD FOR DISPLAY PROVIDED WITH ACTIVATED DESICCANT
Document Type and Number:
Japanese Patent JP2006121043
Kind Code:
A
Abstract:
To improve humidity control characteristics of the package of a micro electromechanical system (MEMS).
An MEMS device package 70 is packaging a substrate 72 provided with an MEMS device 76 formed thereon, a back plane 74, a seal 78, and an unactivated desiccant 80. The desiccant 80 is activated by being exposed to environmental variation after assembling the package or by activating the substance. The method for manufacturing the MEMS device comprises a step for activating the desiccant, and a step for bringing the substrate provided with an MEMS device formed thereon, the seal, and the back plane into contact with each other. The desiccant is arranged on the substrate or the back plane.
Inventors:
PALMATEER LAUREN
CUMMINGS WILLIAM J
GALLY BRIAN J
SAMPSELL JEFFREY B
CUMMINGS WILLIAM J
GALLY BRIAN J
SAMPSELL JEFFREY B
Application Number:
JP2005244481A
Publication Date:
May 11, 2006
Filing Date:
August 25, 2005
Export Citation:
Assignee:
IDC LLC
International Classes:
H01L23/26; B01D53/26; B81B3/00; G02B26/02
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Ryo Hashimoto
Tetsuya Kazama
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Ryo Hashimoto
Tetsuya Kazama
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