Title:
SYSTEM AND METHOD OF PROVIDING MEMS DEVICE WITH ANTI-STICTION COATING
Document Type and Number:
Japanese Patent JP2006099073
Kind Code:
A
Abstract:
To prevent a movable layer from sticking in a MEMS device including an interferometric light modulator.
An anti-stiction coating 102, 106 is formed on at least one surface of a resonance optical cavity having a variable dimension of the MEMS device in order to reduce attractive force between at least one surface and other surfaces of the MEMS device 80. The anti-stiction coating 102, 106 includes a self-aligned monolayer.
Inventors:
PALMATEER LAUREN
CUMMINGS WILLIAM J
GALLY BRIAN J
CUMMINGS WILLIAM J
GALLY BRIAN J
Application Number:
JP2005237311A
Publication Date:
April 13, 2006
Filing Date:
August 18, 2005
Export Citation:
Assignee:
IDC LLC
International Classes:
G02B26/00; B81B3/00; B81C1/00
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Ryo Hashimoto
Tetsuya Kazama
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Ryo Hashimoto
Tetsuya Kazama