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Title:
SYSTEM AND METHOD FOR TREATING SUBSTRATE
Document Type and Number:
Japanese Patent JP2001345241
Kind Code:
A
Abstract:

To improve the throughput of a substrate treating system.

In a substrate treating method in which untreated substrates W are sequentially taken out from cassettes, sequentially transported to a plurality of treatment units, and treated in parallel and, after treatment, treated wafers W are sequentially returned to the cassettes, the predicted treatment ending time of one lot of wafers W is calculated and displayed based on a treatment recipe set to a plurality of wafers W corresponding to at least one lot of wafers W (S85) and a cassette CR housing a plurality of untreated wafers W corresponding to one lot is accepted and another cassette CR housing a plurality of treated wafers W corresponding to one lot is delivered, based on the predicted treatment ending time (S89).


Inventors:
TATEYAMA MASANORI
FUJIMARU SHUZO
Application Number:
JP2000162482A
Publication Date:
December 14, 2001
Filing Date:
May 31, 2000
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
B65G49/06; B65G49/07; G03F7/20; G05B19/418; H01L21/00; H01L21/02; H01L21/027; H01L21/677; (IPC1-7): H01L21/02; B65G49/06; B65G49/07; H01L21/027; H01L21/68
Attorney, Agent or Firm:
Takehiko Suzue (5 outside)