Title:
テープ貼着方法
Document Type and Number:
Japanese Patent JP7427325
Kind Code:
B2
Abstract:
A tape attaching method of attaching an adhesive tape to a workpiece includes a tape attaching step of attaching the adhesive tape to the workpiece in gas having a smaller molecular weight than an average molecular weight of the atmosphere, and a gas permeating step of causing the gas remaining between the workpiece and the adhesive tape to permeate the adhesive tape to thereby be removed, after the tape attaching step is carried out.
Inventors:
Kazuma Sekike
Application Number:
JP2019112537A
Publication Date:
February 05, 2024
Filing Date:
June 18, 2019
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/683; H01L21/301; H01L21/304
Domestic Patent References:
| JP8055824A | ||||
| JP2015162652A | ||||
| JP2009194064A | ||||
| JP2001210701A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano