Title:
透明な構造における三次元の欠陥位置を検出するための技術
Document Type and Number:
Japanese Patent JP3892906
Kind Code:
B2
Abstract:
A method (500) for inspecting anomalies, which are likely defects of several types, namely, particles on the surface, scratches into surface, and defects in bulk material, is provided. This inspection method involves two types of illumination, which can be used separately or together. These two types highlight anomalies sufficiently differently to enable the defect monitoring tool to distinguish between defect type and defect location along an inspection axis. The illumination methods are direct internal side illumination (114) where the plate is used as light pipe, and external front-side illumination (117). In direct internal side illumination, a fiber optic feed (115) with flared end arranged as a line source is abutted to an edge (123) of the plate (102). In external side illumination, the source is light directed at an acute angle, preferably a grazing angle, to one of the surfaces (121). Anomalies such as dust particles on the illuminated surface will scatter light much more efficiently with external front-side illumination, than direct internal side lighting, since particles on the surface would otherwise scatter light only through weak evanescent coupling via the internal side lighting.
Inventors:
Henry, francois jay
Brian, Michael A.
Brian, Michael A.
Application Number:
JP51444197A
Publication Date:
March 14, 2007
Filing Date:
October 04, 1996
Export Citation:
Assignee:
Photon Dynamics Incorporated
International Classes:
G01N21/958; G01B11/00; G01M11/00; G01N21/88
Domestic Patent References:
| JP6294749A | ||||
| JP5018900A | ||||
| JP4320951A | ||||
| JP4012254A |
Attorney, Agent or Firm:
Masaki Yamakawa
Hiroro Kurokawa
Masayuki Konno
Osamu Nishiyama
Jiro Suzuki
Shigeki Yamakawa
Hiroro Kurokawa
Masayuki Konno
Osamu Nishiyama
Jiro Suzuki
Shigeki Yamakawa