Title:
TEMPERATURE ADJUSTMENT DEVICE, ELECTRONIC COMPONENT HANDLING DEVICE, ELECTRONIC COMPONENT TESTING DEVICE, AND METHOD FOR ADJUSTING DUT TEMPERATURE
Document Type and Number:
Japanese Patent JP2023149981
Kind Code:
A
Abstract:
To provide a temperature adjustment device with which it is possible to improve the efficiency of cooling the device under test (DUT).SOLUTION: A temperature adjustment device 40 adjusts the temperature of a DUT 100 when testing the DUT 100 that includes a space 131 having an inlet 132 and an outlet 133 and a die 110 that is disposed inside of the space 131. This temperature adjustment device 40 includes a circulation hole 41 having a connection opening 411 that is connected to the inlet 132 of the space 131 of the DUT 100, and a fluid supply system 50 that is connected to the circulation hole 41 and supplies a fluid for temperature adjustment to the space 131 of the DUT 100.SELECTED DRAWING: Figure 3
Inventors:
KIKUCHI ARITOMO
Application Number:
JP2022058828A
Publication Date:
October 16, 2023
Filing Date:
March 31, 2022
Export Citation:
Assignee:
ADVANTEST CORP
International Classes:
G01R31/26
Attorney, Agent or Firm:
Patent Attorney Corporation Tokoshie Patent Office