Title:
TEMPERATURE MEASURING SYSTEM, HEATING SYSTEM USING THIS SYSTEM AND METHOD OF MANUFACTURING SEMICONDUCTOR WAFER
Document Type and Number:
Japanese Patent JP3783234
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a temperature measuring system receiving little influence of dispersion of a radiation rate of a measuring object, furthermore, accurately measuring temperature regardless of the surface state of the measuring object, and simplifying the constitution of a measuring system when measuring the temperature of the measuring object by using a radiation thermometer.
SOLUTION: A reflecting member 28 is arranged in the shape of forming a reflection void 35 between the member and a temperature measuring surface opposedly to the temperature measuring surface of the measuring object 16. In the reflecting member 28, a part including a reflecting surface 35a is composed of a heat-ray reflecting material for reflecting a heat-ray of a specific wave length band. A heat-ray taking-out passage part 30 is arranged by penetrating through the reflecting member 28 so that one end faces to the temperature measuring surface. The heat-ray taken out of the reflection void via the heat-ray taking-out passage part is detected by a temperature detecting part 34. The heat-ray reflecting material is a laminated body of a plurality of element reflecting layers composed of a material having light transmissivity to the heat-ray, and in these element reflecting layers, mutually adjacent two layers are composed of a combination of materials being mutually different in a reflective index to the heat-ray, and having a refractive index difference of 1.1 or more.
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Inventors:
Takao Abe
Application Number:
JP2003045020A
Publication Date:
June 07, 2006
Filing Date:
February 21, 2003
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
G01J5/00; G01J5/02; G01J5/08; H01L21/205; (IPC1-7): G01J5/02; G01J5/08; H01L21/205
Domestic Patent References:
| JP10098084A | ||||
| JP4305130A |
Foreign References:
| US5814367 | ||||
| US5755511 |
Attorney, Agent or Firm:
Masanori Sugawara
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