Title:
THERMAL FLOW SENSOR
Document Type and Number:
Japanese Patent JP3761769
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To solve the problem of a conventional thermal flow sensor whereby a quantity of heat transmitted by heat conduction and a quantity of heat radiated by heat radiation have no dependency on a flow, and therefore, dependency of a heat dissipation factor on the flow is small, as the proportion of the quantity of heat becomes large, to cause lowering of sensitivity.
SOLUTION: This thermal flow sensor is equipped with a first temperature detecting resistor 5 formed at the upstream side of the flow direction of fluid on a base, a second temperature detecting resistor 5 formed at the downstream side of the flow direction of the fluid on the base, a heating resistor 4 formed so as to heat the first and second temperature detecting resistors 5, and a fluid temperature detecting resistor 6 formed at a position where it receives no influence from the heating resistor 4 on the base.
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Inventors:
Yuji Ariyoshi
Koji Tanimoto
Koji Tanimoto
Application Number:
JP2000185201A
Publication Date:
March 29, 2006
Filing Date:
June 20, 2000
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G01F1/698; F02D35/00; G01F1/692; G01F15/04; (IPC1-7): G01F1/698; F02D35/00; G01F1/692
Domestic Patent References:
| JP7239258A | ||||
| JP9318412A | ||||
| JP63135866A |
Attorney, Agent or Firm:
Hiroaki Tazawa
Konobu Kato
Konobu Kato