Thermal treatment equipment, an exfoliation system, a heat treating method, a program, and a computer storage

Title:

Thermal treatment equipment, an exfoliation system, a heat treating method, a program, and a computer storage

Document Type and Number:

Japanese Patent JP6093255

Kind Code:

B2

Inventors:

Norihiko Okamoto

Application Number:

JP2013139556A

Publication Date:

March 08, 2017

Filing Date:

July 03, 2013

Export Citation:

Assignee:

東京エレクトロン株式会社

International Classes:

H01L21/02; H01L21/683

Domestic Patent References:

Attorney, Agent or Firm:

Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara
Naoki Ogita

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