Title:
熱処理装置および熱処理方法
Document Type and Number:
Japanese Patent JP5559656
Kind Code:
B2
Inventors:
Shin-ichi Kato
Hiroyoshi Kiyama
Hiroyoshi Kiyama
Application Number:
JP2010231093A
Publication Date:
July 23, 2014
Filing Date:
October 14, 2010
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/027; H01L21/265; H01L21/3065; H01L21/31
Attorney, Agent or Firm:
Hidetoshi Yoshitake
Takahiro Arita
Takahiro Arita