Title:
THERMISTOR ELEMENT AND ELECTROMAGNETIC SENSOR
Document Type and Number:
Japanese Patent JP2022126582
Kind Code:
A
Abstract:
To provide a thermistor element in which the contact area between an electrode and a thermistor film can be enlarged.SOLUTION: A thermistor element includes a thermistor film 5, a pair of first electrodes 6a and 6b provided in contact with one surface of the thermistor film 5, an insulating film 7b provided on the side of the pair of first electrodes 6a and 6b that is opposite to the side thereof in contact with the thermistor film 5, and one or more opening parts 20a and 20b existing in regions overlapping with the pair of first electrodes 6a and 6b in a plan view and penetrating the insulating film 7b. The first electrodes 6a and 6b include a first part 61 existing in a region overlapping with the opening parts 20a and 20b in a plan view, and a second part 62 existing out of the region overlapping with the opening parts 20a and 20b in a plan view and is provided in contact with one surface of the thermistor film 5 across a region between the first part 61 and the second part 62.SELECTED DRAWING: Figure 5
Inventors:
AOKI SUSUMU
HARA SHINJI
OTA NAOKI
SHIROKAWA MAKIKO
HARA SHINJI
OTA NAOKI
SHIROKAWA MAKIKO
Application Number:
JP2021178767A
Publication Date:
August 30, 2022
Filing Date:
November 01, 2021
Export Citation:
Assignee:
TDK CORP
International Classes:
G01J1/02; H01C7/04
Attorney, Agent or Firm:
Shu Oikawa
Norihiko Ara
Akihiro Ogino
Hiroyuki Matsumoto
Norihiko Ara
Akihiro Ogino
Hiroyuki Matsumoto
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