PURPOSE: To provide a resistance composition which gives a thick film resistor having stabilized resistance characteristics by a method wherein a wide resistance region is obtained by uniformly dispersing microscopic conductive particles into the glass matrix of a resistor after it has been calcined.
CONSTITUTION: A metal boride of 0.1 to 50wt.% having the y/x, indicated by MxBy (M indicates a metal element, and B indicates a boride, and x and y indicate integers), in excess of 6, and glass frit, containing the glass component of 1 to 50 pts.wt. in terms of tantalum oxide, of 50 to 99.9 pts.wt. are mixed. Further, an organic vehicle is added, and a thick film resistance composition is obtained. The surface of an inorganic substrate is coated with the above- mentioned composition, and a rasistance film of prescribed shape is formed. Then, aforesaid material is calcined at 700 to 950°C in an inert gas atmosphere. As a result, the tantalum boride particles of 1μm or smaller in diameter are precipitated into the glass matrix, or a conductive path can be formed, the resistivity of the resistor can be made uniform, and resistance characteristics can also be stabilized.
ASAI TADAMICHI
OGAWA TOSHIO
HITACHI CHEMICAL CO LTD