Title:
THICKNESS MEASUREMENT METHOD, THICKNESS MEASUREMENT DEVICE, AND MANUFACTURING METHOD OF GLASS SUBSTRATE
Document Type and Number:
Japanese Patent JP2017090151
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a thickness measurement method, a thickness measurement device, and a manufacturing method of a glass substrate which reduce the influence of water quality.SOLUTION: A thickness measurement method includes: a step of forming water columns W1, W2 by jetting flowing water; a step of bringing the water columns into contact with a measurement object G; a step of irradiating positions where the measurement object and the water columns contact with each other with light S having a predetermined wavelength band, which has been made to pass through the water columns, by using a sensor 600; a step of receiving reflection light of the light having the predetermined wavelength band in the measurement object by using the sensor; and a step of calculating the thickness of the measurement object by using the reflection light.SELECTED DRAWING: Figure 2
Inventors:
TSUCHIYA MAKOTO
Application Number:
JP2015218430A
Publication Date:
May 25, 2017
Filing Date:
November 06, 2015
Export Citation:
Assignee:
ASAHI GLASS CO LTD
International Classes:
G01B11/06; G11B5/84
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
Previous Patent: ロータ
Next Patent: An internal resistance calculation device, a computer program, and an internal resistance calculatin...
Next Patent: An internal resistance calculation device, a computer program, and an internal resistance calculatin...