THIN FILM DEPOSITION METHOD - COMMISSARIAT ENERGIE ATOMIQUE

Title:

THIN FILM DEPOSITION METHOD

Document Type and Number:

Japanese Patent JPS5955368

Kind Code:

A

Inventors:

JIERAARU BURANDONE
MISHIERU KUURU
IBU RAGARUDO

Application Number:

JP15011383A

Publication Date:

March 30, 1984

Filing Date:

August 17, 1983

Export Citation:

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Assignee:

COMMISSARIAT ENERGIE ATOMIQUE

International Classes:

C25D9/00; B05D1/04; C03C17/245; C23C14/24; C23C16/448; C23C16/50; C23C18/02; C23C26/00; C25D5/20; (IPC1-7): B05D1/04; C03C17/00; C23C11/00; C23C13/00; C23D5/10; C25D5/20; C25D9/00

Attorney, Agent or Firm:

Yoshio Kawaguchi

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