Title:
THIN FILM MAGNETIC HEAD AND SUBSTRATE THEREFOR
Document Type and Number:
Japanese Patent JPH03113817
Kind Code:
A
Abstract:
PURPOSE: To obtain the substrate for a thin-film magnetic head having an insulating film and free of warpage by forming an oxide insulating film on both principal planes of a ceramic substrate member.
CONSTITUTION: The insulating film 3 is formed on both principal planes of the substrate member 2 to obtain the substrate 1 for a thin-film magnetic head. The member 2 is made of a ceramic material, and its thickness is preferably controlled to about 0.3-4.0 mm. Al2O3, Ta2O5, SiO2, etc., are appropriately used as the oxide insulating material for the film 3, and the thickness of the film 3 is preferably controlled to about 3-30μm. As a result, the warpage of the substrate 1 is prevented even if the member 2 is thinned.
Inventors:
MATSUZAKI MIKIO
Application Number:
JP24892989A
Publication Date:
May 15, 1991
Filing Date:
September 25, 1989
Export Citation:
Assignee:
TDK CORP
International Classes:
G11B5/31; (IPC1-7): G11B5/31
Attorney, Agent or Firm:
Youichi Ishii