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Title:
THIN-FILM SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS56125868
Kind Code:
A
Abstract:

PURPOSE: To increase the density while stabilizing electrical characteristics by forming a conductor layer to which fixed potential is given between an MISFET of the first layer and an MISFET of the second layer.

CONSTITUTION: A semiconductor layer 3 is made up on an SiO2 film 2 on the surface of an Si substrate 1, and a source region S1, a drain region D1 and an active region C1 of an MISFET are built up to the semiconductor layer 3. A gate electrode 5 is formed on the active region C1 through a gate SiO2 film 4. An SiO2 film 6 and a conductor layer 7 consisting of polycrystalline Si are further made up on the semiconductor layer 3. Fixed potential such as earth potential is given to the conductor layer 7. A semiconductor layer 9 of the second layer is built up through an SiO2 film 8, and a source region S2, a drain region D2 and an active region C2 of an MISFET are formed to the semiconductor layer 9.


Inventors:
IWAMATSU SEIICHI
Application Number:
JP2790480A
Publication Date:
October 02, 1981
Filing Date:
March 07, 1980
Export Citation:
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Assignee:
CHO LSI GIJUTSU KENKYU KUMIAI
International Classes:
H01L27/00; H01L21/8238; H01L27/06; H01L27/092; H01L27/15; H01L29/40; H01L29/78; H01L29/786; (IPC1-7): H01L27/04; H01L29/40; H01L29/78
Domestic Patent References:
JPS5130485A1976-03-15



 
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