Title:
Thin substrate processing device
Document Type and Number:
Japanese Patent JP6022373
Kind Code:
B2
Inventors:
Fujinaga Tetsushi
Masahiro Matsumoto
Makoto Arai
Mase Eriko
Harunori Iwai
Koji Takahashi
Atsuhito Ibori
Masahiro Matsumoto
Makoto Arai
Mase Eriko
Harunori Iwai
Koji Takahashi
Atsuhito Ibori
Application Number:
JP2013019768A
Publication Date:
November 09, 2016
Filing Date:
February 04, 2013
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/50; C23C14/34
Domestic Patent References:
| JP58032410A | ||||
| JP2011149100A | ||||
| JP62193141A | ||||
| JP2006028562A | ||||
| JP2011530833A | ||||
| JP10064908A | ||||
| JP62035517A |
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda
Makoto Onda