PURPOSE: To provide a three-dimensional displacement measuring instrument having a simple constitution.
CONSTITUTION: In a three-dimensional displacement measuring instrument S which measures the displacement of an object to be measured by causing a bundle of measuring rays and bundle of reference rays to interfere with each other, an optical element 12 which can detect the intensity and incident position of light is provided at least on one side of an optical element which receives split light produced by splitting the bundle of interference light of the bundles of measuring and reference rays. Therefore, the instrument S can measure the three-dimensional displacement of the object by providing only one probe corner-cube prism 4 against the object.
OKUMURA HIROSHI
NAKABAYASHI SHIRO
