Title:
THREE-DIMENSIONAL FORM MEASURING DEVICE, AND MEASURING METHOD OF THREE-DIMENSIONAL FORM USING SAME
Document Type and Number:
Japanese Patent JPH05332735
Kind Code:
A
Abstract:
PURPOSE:To perform a highly precise measurement of three-dimensional form by correcting the focusing information obtained by a focusing state judging optical system by the error information by the divergence of an objective lens in the position from optical axis where the reflected light from a material to be measured is entered to the objective lens. CONSTITUTION:Since the focusing information has the influence by the aberration of an objective lens 306, the position where a luminous flux is entered to the lens 306 is determined by an inclination optical system 162, and the focusing information is corrected by the aberration quantity. Specifically, the positions D, E in which reflected lights 172, 173 are transmitted by the lens 306 are determined from the imaging positions D', E' of a spot image on a sensor 111. The lens 306 has the aberration and thus a focusing slippage in the distance L to the surface 331a of a material 331 to be measured. Therefore, in the state where no correction is conducted, automatic focusing is conducted with the information from a focusing state judging optical system 361. Thus, the luminous flux incident position to the lens 306 is determined by use of the detection data of the inclination optical system 162, and the focusing information is corrected according to the aberration and the accompanying focusing slippage quantity.
Inventors:
MIYAZAKI KYOICHI
SUDA SHIGEYUKI
YOSHII MINORU
SUDA SHIGEYUKI
YOSHII MINORU
Application Number:
JP16422792A
Publication Date:
December 14, 1993
Filing Date:
May 29, 1992
Export Citation:
Assignee:
CANON KK
International Classes:
G01B11/24; G01B11/245; (IPC1-7): G01B11/24
Attorney, Agent or Firm:
Takanashi Yukio