Title:
THREE DIMENSIONAL MEASURING DEVICE
Document Type and Number:
Japanese Patent JP3768822
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To three-dimensionally measure even the steep surface of an object to be measured.
SOLUTION: This measuring device is equipped with Xθ, Yθ stages 2, 3 rotatably provided by a stepping motor on a base 1, X, Y stages 4, 5 provided on the Yθ stage 3 so that it can be linearly moved by a manual dial, a spacer 6 positioned on the Y stage 5 to mount a spherical lens W, a measuring instrument 8 having a light probe part 7 to measure the three dimensional shape on the surface of the spherical lens W, and a computer 10 to control the stepping motor and the measuring instrument 8. The center of rotation is shared for the Xθ, Yθ stages 2, 3, and the thickness of the X stage 4, the Y stage 5 and the spacer 6 is set so that the shared center of rotation has a fixed relation with the spherical center of the spherical lens W. Xθ, Yθ, Z coordinate values are obtained by driving the Xθ, Yθ stages 2, 3, and these Xθ, Yθ, Z coordinate values are indicated by converting them to coordinate values of the axis of X, Y, Z coordinates, and by removing a curvature component obtained from a spherical surface approximation.
Inventors:
Norio Kimura
Application Number:
JP2001054471A
Publication Date:
April 19, 2006
Filing Date:
February 28, 2001
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B11/00; G01B11/24; G01B11/25; (IPC1-7): G01B11/00; G01B11/24; G01B11/25
Domestic Patent References:
| JP11132752A | ||||
| JP10318729A | ||||
| JP9288041A |
Attorney, Agent or Firm:
Yasuhiko Hibiya
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