Title:
TITANIA-DOPED QUARTZ GLASS MEMBER AND PRODUCING METHOD OF THE SAME
Document Type and Number:
Japanese Patent JP2010013335
Kind Code:
A
Abstract:
To provide a titania-doped quartz glass member having a surface with a high level of precision necessary for EUV lithography members, typically EUV lithography photomask substrates, which are improved in flatness and thermal expansion properties.
In the titania-doped quartz glass member having a surface where EUV light of up to 70 nm wavelength is reflected, a refractive index distribution in the surface has only one extreme point within a central 80% region of the member.
Inventors:
MAIDA SHIGERU
OTSUKA HISATOSHI
OTSUKA HISATOSHI
Application Number:
JP2008177076A
Publication Date:
January 21, 2010
Filing Date:
July 07, 2008
Export Citation:
Assignee:
SHINETSU CHEMICAL CO
International Classes:
C03B20/00; C03B8/04; C03C3/06; G03F1/24; G03F1/60
Domestic Patent References:
| JPH07187683A | 1995-07-25 | |||
| JP2007182367A | 2007-07-19 | |||
| JP2006210404A | 2006-08-10 |
Foreign References:
| WO2004092082A1 | 2004-10-28 |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa