Title:
TITANIUM COMPLEX, PRODUCTION METHOD OF THE COMPLEX, TITANIUM-CONTAINING THIN FILM AND FORMING METHOD OF THE THIN FILM
Document Type and Number:
Japanese Patent JP2007153872
Kind Code:
A
Abstract:
To provide a production method of a new titanium complex, and to provide a forming method of a titanium-containing thin film by using the production method.
The titanium complex represented by general formula (1) is produced by reacting a diimine with a metallic lithium and reacting with a tetrakisamide complex and the titanium-containing thin film is formed by using the titanium complex as a raw material. [Wherein, R1 and R4 are each independently a (fluorinated) 1-6C alkyl; R2 and R3 are each independently H or a (fluorinated) 1-3C alkyl; and R5 and R6 are each independently a (fluorinated) 1-4C alkyl].
Inventors:
TADA KENICHI
INABA KOICHIRO
FURUKAWA YASUSHI
CHIBA YOICHI
YAMAKAWA SATORU
OSHIMA KENSHO
INABA KOICHIRO
FURUKAWA YASUSHI
CHIBA YOICHI
YAMAKAWA SATORU
OSHIMA KENSHO
Application Number:
JP2006242617A
Publication Date:
June 21, 2007
Filing Date:
September 07, 2006
Export Citation:
Assignee:
TOSOH CORP
SAGAMI CHEM RES
SAGAMI CHEM RES
International Classes:
C07F7/28; C07C251/08; C23C16/18; H01L21/28; H01L21/285
Foreign References:
| US5607722A | 1997-03-04 | |||
| US5908947A | 1999-06-01 |