Title:
【発明の名称】アライメント方法
Document Type and Number:
Japanese Patent JP3366941
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To apply an alignment method even in the case that light can not expose a photodiode array and that the transmissivity of a beam splitter is high and to easily perform alignment. SOLUTION: In the alignment method, a transmitted parallel light signal is inputted to the photodiode array 2. The beam splitter 10 is placed in the optical path of the parallel light signal, and the reflected signal light of the parallel light signal transmitted to and reflected at the photodiode array 2 is branched by the beam splitter 10 and picked up by a camera 11. Then a forward current is passed through the photodiode array 2 to make a light receiving part emit light, and the light from the light receiving part is branched by the beam splitter 10 and picked up by the camera 11 to simultaneously observe the image of the reflected signal light in the image and the light image from the light receiving part. By matching both locations, alignment is performed.
Inventors:
Moriya Nakamura
Kenichi Kitayama
Kenichi Kitayama
Application Number:
JP2000252294A
Publication Date:
January 14, 2003
Filing Date:
August 23, 2000
Export Citation:
Assignee:
National Institute of Communications Research
International Classes:
G01B11/00; G01B11/27; H01L27/14; H01L27/15; H01L31/0232; (IPC1-7): G01B11/00; G01B11/27; H01L27/14; H01L27/15; H01L31/0232
Domestic Patent References:
| JP200019357A | ||||
| JP2000146524A |
Attorney, Agent or Firm:
Kenzo Fukuda (2 outside)