Title:
【発明の名称】角速度センサ
Document Type and Number:
Japanese Patent JP3106395
Kind Code:
B2
Abstract:
An angular velocity sensor includes: a board (1) in the form of a flat plate; a rotational vibrator (4) extended to the right and left from a central axis (01 - 01) vertical to the board (1) at the center of rotational vibration over the board (1) and supported at the location of the central axis (01 - 01) by rotational supporting beams (5, 7) so as to be rotationally vibrated; a first vibrator (6) located on the left side of the rotational vibrator (4) and supported by first supporting beams (5); a second vibrator (8) located on the right side of the rotational vibrator (4) and supported by second supporting beams (7); a rotational vibration generator (12A - D) for vibrating the second vibrator (8) backward and forward when the first vibrator (6) is vibrated forward and backward by giving rotational vibration to the rotational vibrator (4); a first displacement detector (16L, 16R) for detecting displacement of the first vibrator (6) vibrated to the right and left when an angular velocity is applied around the central axis (01 - 01) of the rotational vibrator (4) in the state that rotational vibration is given to the rotational vibrator (4) by the rotational vibration generator (12A - D); and a second displacement detector (20L, 20R) for detecting displacement of the second vibrator (8) vibrated to the right and left when an angular velocity is applied around the central axis (01 - 01) of the rotational vibrator (4) in the state that rotational vibration is given to the rotational vibrator (4) by the rotational vibration generator (12A - D).
Inventors:
Yasuhiro Negoro
Application Number:
JP21184598A
Publication Date:
November 06, 2000
Filing Date:
July 10, 1998
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
G01C19/56; G01C19/5712; G01C19/5719; (IPC1-7): G01C19/56; G01P9/04
Domestic Patent References:
| JP9325032A | ||||
| JP8184444A | ||||
| JP791958A |
Other References:
【文献】米国特許5377544(US,A)
【文献】国際公開98/23917(WO,A1)
【文献】国際公開98/23917(WO,A1)
Attorney, Agent or Firm:
Kazuhiko Hirose