Title:
DETECTING DEVICE FOR ERRONEOUS HOUSING OF PLATE
Document Type and Number:
Japanese Patent JPH0685041
Kind Code:
A
Abstract:
PURPOSE: To detect whether the plate housed in a carrier is correctly set or not, relating to an erroneous housing detecting device for a plate.
CONSTITUTION: A sensor 2 which detects presence of multiple plates housed in a carrier 1, a position detecting means 4 which detects the relative position of the carrier and sensor and a control part 7 which compares and calculates the position information obtained by the position detecting means and the plate information where the thickness of plates housing pitches are preset, are provided.
Inventors:
KOJIMA TADAYUKI
Application Number:
JP23066692A
Publication Date:
March 25, 1994
Filing Date:
August 31, 1992
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/67; G06T1/00; H01L21/68; (IPC1-7): H01L21/68; G06F15/64
Attorney, Agent or Firm:
Teiichi
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