Title:
【発明の名称】金属間シールを用いた清浄ガス流制御弁
Document Type and Number:
Japanese Patent JP2733864
Kind Code:
B2
Abstract:
A sealed valve intended for use in ultrahigh purity applications uses a metal-to-metal seal in a crucial, but unaccessible, portion of the valve. The metal-to-metal seal avoids the use of a weld which because of the location could not be adequately cleaned, and avoids the use of an O-ring seal. The O-ring seal typically would have a leak rate on the order of 10<-><7> standard cubic centimeters per second of helium, but the metal-to-metal seal provides a leakage rate of less than 10<-><1><3> sccm/s. In the preferred embodiment, the seal is formed by forcing a conical part into the opening of a bore. The force used is small enough to avoid permanent deformation of the sealing parts, and thus the seal can be opened and closed any number of times without degradation.
More Like This:
Inventors:
MAIKERU II JOONZU
JOZEFU EICHI NIKORUSU
RONARUDO JII HENDORII
CHAARUZU EMU OOBAAMAIAA
JOZEFU EICHI NIKORUSU
RONARUDO JII HENDORII
CHAARUZU EMU OOBAAMAIAA
Application Number:
JP8843090A
Publication Date:
March 30, 1998
Filing Date:
April 04, 1990
Export Citation:
Assignee:
KURAIORABU INC
International Classes:
F16K1/10; F16K41/10; (IPC1-7): F16K41/10
Domestic Patent References:
| JP6426081A | ||||
| JP6431277U |
Attorney, Agent or Firm:
Motohiro Kurauchi (1 outside)