Title:
【発明の名称】ダイシング装置
Document Type and Number:
Japanese Patent JP2860131
Kind Code:
B2
Inventors:
TAKAHASHI TOSHIAKI
Application Number:
JP2627690A
Publication Date:
February 24, 1999
Filing Date:
February 06, 1990
Export Citation:
Assignee:
DEISUKO KK
International Classes:
B28D5/00; H01L21/301; H01L21/78; (IPC1-7): H01L21/301; B28D5/00
Attorney, Agent or Firm:
Akimoto Teruo