Title:
【発明の名称】三次元測定機の誤差補正方法
Document Type and Number:
Japanese Patent JP2748702
Kind Code:
B2
Abstract:
A three-dimension measuring apparatus having a probe, such as non-contact optical probe, is used to measure the surface of an object, such as an aspherical lens. Initially, the apparatus is used to obtain reference probe measured values of a reference spherical surface having a concave surface and a convex surface. The thus obtained reference probe measure values are compared with data denoting an ideal spherical surface to determine measurement errors corresponding to inclinations of the surface of an object to be measured. Then, the apparatus is used to measure the object to obtain respective probe measured values. The previously determined measurement errors are subtracted from the measured values of corresponding inclinations, thereby compensating for the measurement errors during measurement of the object surface.
Inventors:
YOSHIZUMI KEIICHI
Application Number:
JP1330391A
Publication Date:
May 13, 1998
Filing Date:
February 04, 1991
Export Citation:
Assignee:
MATSUSHITA DENKI SANGYO KK
International Classes:
G01B21/20; G01B11/255; (IPC1-7): G01B21/20
Domestic Patent References:
| JP2254307A |
Attorney, Agent or Firm:
Tomoyuki Takimoto (1 person outside)