Title:
【発明の名称】エッチング方法
Document Type and Number:
Japanese Patent JP3011492
Kind Code:
B2
Inventors:
Yoshihiro Hoshi
Motoki Kobayashi
Jun Kanamori
Motoki Kobayashi
Jun Kanamori
Application Number:
JP17590791A
Publication Date:
February 21, 2000
Filing Date:
June 21, 1991
Export Citation:
Assignee:
Miyagi Oki Electric Co., Ltd.
Oki Electric Industry Co., Ltd.
Oki Electric Industry Co., Ltd.
International Classes:
H01L21/302; H01L21/304; H01L21/3065; (IPC1-7): H01L21/3065; H01L21/304
Domestic Patent References:
| JP4306830A |
Attorney, Agent or Firm:
Kenji Ohnishi