Title:
【発明の名称】画像形成用露光装置
Document Type and Number:
Japanese Patent JP2769748
Kind Code:
B2
Abstract:
An exposure apparatus having upper and lower ultraviolet rays irradiating devices which are vertically symmetrically disposed above and below a pattern-forming board having through holes therein, and upper and lower light-transmissible plates which are disposed spacedly from each other in a light path of the ultraviolet rays irradiated to the board so as to be vertically symmetrically disposed with respect to the board and horizontally movable, each of the ultraviolet rays irradiating devices having an electric discharge lamp and a reflection mirror and each of the light-transmissible plates having an uneven surface of a sawtooth section. With this arrangement, a proper photochemical reaction can be induced to the photoresist on the surface of the board and the inner wall surfaces of the through holes to thereby improve a working efficiency of a pattern forming process.
Inventors:
Chiaki Abe
Minoru Watanuki
Minoru Watanuki
Application Number:
JP10743091A
Publication Date:
June 25, 1998
Filing Date:
May 13, 1991
Export Citation:
Assignee:
Oak Manufacturing Co., Ltd.
International Classes:
C04B32/00; C04B14/20; C04B14/38; C04B18/08; C04B22/06; C04B28/18; E04F13/14; G03B27/32; G03F7/20; H01L21/027; H05K3/00; H05K3/06; (IPC1-7): G03F7/20; H01L21/027; H05K3/00
Domestic Patent References:
| JP3150549A | ||||
| JP60168147A |
Attorney, Agent or Firm:
Dozo Isono