Title:
【発明の名称】流体加熱装置
Document Type and Number:
Japanese Patent JP3322322
Kind Code:
B2
Inventors:
Tetsuo Ohnishi
Makio Tsubota
Kadani Kan I
Makio Tsubota
Kadani Kan I
Application Number:
JP24479393A
Publication Date:
September 09, 2002
Filing Date:
September 30, 1993
Export Citation:
Assignee:
KOMATSU LTD.
International Classes:
B08B3/10; B05C9/10; C25D21/02; F24H1/10; H01L21/304; (IPC1-7): F24H1/10
Domestic Patent References:
| JP53843U |
Attorney, Agent or Firm:
Masaaki Yonehara (2 others)