Title:
【発明の名称】高温反応器
Document Type and Number:
Japanese Patent JP3215407
Kind Code:
B2
Abstract:
The present invention relates to an insulation system for a high temperature reactor in which chlorosilanes and hydrogen gases are present. The system described comprises an inner graphite radiant heat shield and an outer carbon-based, rigid, felt insulation of high density. The inner radient heat shield provides increased chemical stability at the hot face in a chlorosilane and hydrogen reactor. Also, the inner radient heat shield reduces the temperature at the interface with the carbon-based rigid felt, thereby reducing the reactivity of the chlorosilanes with the carbon-based rigid felt. The high density of the carbon-based rigid belt further reduces radiant heat loss. More importantly, the high density of the carbon-based rigid felt excludes the highly heat conductive hydrogen gas from the voids of the flet. The insulation system, as described, allows reactors containing chlorosilanes and hydrogen gases to be operated at higher and more efficient temperatures for longer periods of time.
Inventors:
Lichyard Anthony Barge
Application Number:
JP18735290A
Publication Date:
October 09, 2001
Filing Date:
July 17, 1990
Export Citation:
Assignee:
Hemlock Semiconductor Corporation
International Classes:
B01J19/00; C01B33/03; C01B33/107; F16L59/02; C07F7/12; C07F7/20; F16L59/08; (IPC1-7): F16L59/02; F16L59/08
Domestic Patent References:
| JP59154788A | ||||
| JP58138981A | ||||
| JP15984A | ||||
| JP63260875A | ||||
| JP6369707A | ||||
| JP6058847A | ||||
| JP2227244A | ||||
| JP62292429A | ||||
| JP62149142A | ||||
| JP120132A | ||||
| JP60146335U | ||||
| JP60117927U | ||||
| JP1180095U | ||||
| JP132126U | ||||
| JP132917B2 | ||||
| JP549916B2 | ||||
| JP4915592B1 | ||||
| JP230715Y2 | ||||
| JP547920Y2 |
Other References:
【文献】特許2603118(JP,B2)
【文献】特許2607670(JP,B2)
【文献】特許2862580(JP,B2)
【文献】特許2607670(JP,B2)
【文献】特許2862580(JP,B2)
Attorney, Agent or Firm:
Warren G. Simor