Title:
【発明の名称】クリーンルーム内で用いられる器具及び装着具
Document Type and Number:
Japanese Patent JP3305725
Kind Code:
B2
Abstract:
There are instruments used for handling a substrate in a clean room at room temperature and atmospheric pressure, which contain a resin base and at least one additive selected from the group consisting of a lubricant, a plasticizer, an anti-oxidizing agent and an antistatic agent, and the additives do not generate gaseous organic material compound under conditions of room temperature and atmospheric pressure.
Inventors:
Misako Saito
Takenobu Matsuo
Go Wakabayashi
Sadao Kobayashi
Yoshihide Wakayama
Masayuki Imafuku
Takenobu Matsuo
Go Wakabayashi
Sadao Kobayashi
Yoshihide Wakayama
Masayuki Imafuku
Application Number:
JP53511897A
Publication Date:
July 24, 2002
Filing Date:
March 27, 1997
Export Citation:
Assignee:
東京エレクトロン株式会社
大成建設株式会社
大成建設株式会社
International Classes:
H01L21/68; A43B1/14; A43B3/16; H01L21/67; H01L21/673; H01L21/677; (IPC1-7): H01L21/68; A41D13/02; A43B1/14; B65D85/86
Domestic Patent References:
| JP341747A | ||||
| JP609902A | ||||
| JP8288377A | ||||
| JP8250581A | ||||
| JP1169034U | ||||
| JP1119501U | ||||
| JP5508517A |
Other References:
阿部嘉長、外１名，新版プラスチックス配合剤，日本，大成社，１９８７年１１月３０日，Ｐ．２１−６４，１６９−１８８，２６１−２８１，２８３−３０５
Attorney, Agent or Firm:
Takehiko Suzue (2 outside)