Title:
【発明の名称】磁気研磨装置
Document Type and Number:
Japanese Patent JP3322171
Kind Code:
B2
Inventors:
Nobuhiro Yoshioka
Shigeki Banno
Shigeki Banno
Application Number:
JP16316497A
Publication Date:
September 09, 2002
Filing Date:
June 20, 1997
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS,LTD.
International Classes:
B24B31/112; (IPC1-7): B24B31/112
Domestic Patent References:
| JP8323613A | ||||
| JP4141346A | ||||
| JP633639U |
Attorney, Agent or Firm:
Junji Ando (1 person outside)