Title:
【発明の名称】金属薄膜パタ-ンの形成方法
Document Type and Number:
Japanese Patent JP2514207
Kind Code:
B2
Inventors:
Mariko Tanaka
Application Number:
JP15958387A
Publication Date:
July 10, 1996
Filing Date:
June 29, 1987
Export Citation:
Assignee:
富士通株式会社
International Classes:
G03C5/00; G03F7/00; G03F7/004; G03F7/008; G03F7/38; G03F7/40; H01L21/3205; H01L23/52; H05K3/06; H05K1/03; H05K3/02; (IPC1-7): G03F7/008; G03F7/38; G03F7/40; H01L21/3205; H05K3/06
Domestic Patent References:
| JP5319787A | ||||
| JP61256657A | ||||
| JP63286842A | ||||
| JP57198453A | ||||
| JP5516386B2 |
Attorney, Agent or Firm:
Aoki Akira (3 outside)