Title:
【発明の名称】基板の表面の処理方法及び装置
Document Type and Number:
Japanese Patent JP3014977
Kind Code:
B2
Abstract:
A method of monitoring surface layer growth using light scattered off a surface illuminated e.g. by a laser. A small area of a surface of a substrate is illuminated and the light scattered in a non-specular direction is detected during cleaning and subsequent layer growth. The amount of light scattered varies strongly with surface characteristics and gives clear indication of the end of oxide removal, initiation of nucleation and quality of growing layers. The monitoring is used during e.g. chemical vapor deposition, or e.g. molecular beam epitaxy growth processes.
Inventors:
David Jiyoung Robbins
Application Number:
JP31091296A
Publication Date:
February 28, 2000
Filing Date:
November 21, 1996
Export Citation:
Assignee:
Great Britain
International Classes:
G01B11/30; C23C16/52; C30B23/08; C30B25/16; C30B29/06; G01B11/06; G01N21/47; H01L21/20; H01L21/203; H01L21/205; H01L21/302; H01L21/3065; H01L21/66; G01N21/21; G01N21/84; (IPC1-7): C30B23/08; C23C16/52; C30B25/16; G01B11/30; G01N21/47; H01L21/20
Domestic Patent References:
| JP57162420A |
Other References:
【文献】米国特許4332833(US,A)
【文献】欧州特許298080(EP,B1)
【文献】高橋清編「分子線エピタキシー技術」株式会社工業調査会(1984.1.20)第97~99頁,第104頁
【文献】欧州特許298080(EP,B1)
【文献】高橋清編「分子線エピタキシー技術」株式会社工業調査会(1984.1.20)第97~99頁,第104頁
Attorney, Agent or Firm:
Yoshio Kawaguchi